Master of Science in Microelectronic Engineering

Rochester Institute of Technology (RIT)

Program Description

Master of Science in Microelectronic Engineering

Rochester Institute of Technology (RIT)

The program has a number of outcomes for its students:

  • Understand the fundamental scientific principles governing solid-state devices and their incorporation into modern integrated circuits.
  • Understand the relevance of a process or device, either proposed or existing, to current manufacturing practices.
  • Develop in-depth knowledge in existing or emerging areas of the field of microelectronics, such as device engineering, circuit design, lithography, materials and processes, and yield and manufacturing.
  • Apply microelectronic processing techniques to the creation/investigation of new process/device structures.
  • Communicate technical material effectively through oral presentations, written reports, and publications.

The prerequisites include a bachelor of science degree in engineering (such as electrical or microelectronic engineering), including an introductory course in device physics and an introductory course in fabrication technology. Students from RIT’s BS program in microelectronic engineering will meet these prerequisites. Students who do not have these prerequisites can take these courses during their first quarter of study and still complete the MS program in two years. The prerequisite courses will not count toward the 36 credits of graduate courses required for the MS degree.

Curriculum

The program consists of eight graduate courses (700-level or higher), including seven core courses and one elective course for students with a BS degree in a discipline other than microelectronic engineering. Five core courses and three elective courses are required for students with a BS in microelectronic engineering. In addition, all students are required to take a variable-credit (1 or 0 credit) seminar/research course each quarter they are enrolled in the program. Up to 4 credits will be allowed toward the required 36 credit hours. A 9-credit thesis, which includes an oral defense, is required of all students. The total number of credits needed for the MS in microelectronic engineering is 45.

Core courses

  • 0301-712 Physics and Scaling of CMOS
  • 0305-702 Microelectronics II, Lab
  • 0305-703 Microelectronics III, Lab
  • 0305-704 Semiconductor Process and Device Modeling
  • 0305-705 Quantum and Solid State Physics for Nanostructures
  • 0305-721 Microlithography Materials, Lab
  • 0305-731 Microelectronics Manufacturing I, Lab
  • 0305-732 Microelectronics Manufacturing II, Lab

*Microelectronics Manufacturing I and Lab (0305-731) cannot be taken for graduate degree credit by students with a BS in microelectronic engineering.

Elective courses

The following elective courses are offered:

  • 0305-706 SiGe and SOI Devices and Technology
  • 0305-707 Nanoscale CMOS and Beyond
  • 0305-714 Micro- and Nano-Characterization
  • 0305-722 Microlithography Systems, Lab
  • 0305-732 Microelectronics Manufacturing II, Lab
  • 0305-830 Metrology for Yield and Failure Analysis
  • 0305-870 Microelectromechanical Systems
  • 0305-890 Special Topics

Based on particular needs, students (with departmental approval) may choose electives from other programs at the university.

This school offers programs in:
  • English
Rochester Institute of Technology (RIT)

Last updated April 25, 2018
Duration & Price
This course is Campus based
Start Date
Start date
Sept. 2019
Duration
Duration
2 - 2 years
Full time
Price
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Locations
USA - Rochester, New York
Start date : Sept. 2019
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Dates
Sept. 2019
USA - Rochester, New York
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